Miniaturized magnetic nitrogen DC microplasmas

IEEE Transactions on Plasma Science

Volumn 32, Issue 1 III, 2004, Pages 282-287

  Wilson, Chester G ^a,b   Gianchandani, Yogesh B ^a,b  

^a University of Michigan   (United States)

^b University of Wisconsin Madison   (United States)

Author keywords

Magnetic confinement; Manufacturing; Microdischarge; Microplasma; Sensing

Indexed keywords

CATHODES; ELECTRIC POTENTIAL; ELECTRODES; FINITE ELEMENT METHOD; MAGNETIC FIELDS; MAGNETRONS; MAGNETS; PLASMA CONFINEMENT; PLASMA DENSITY; PLASMA SHEATHS;

LANGMUIR PROBES; MAGNETIC CONFINEMENT; MICRODISCHARGE; MICROPLASMAS;

PLASMAS;

EID: 2442543142     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2004.824005     Document Type: Article

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