A micromachined titanium sputter ion pump for cavity pressure control

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 754-757

  Wright, Scott A ^a,b   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; PRESSURE CONTROL; PUMPS; SPUTTER DEPOSITION; VOLTAGE CONTROL;

APPLIED VOLTAGE; CAVITY PACKAGE; PRESSURE REDUCTION; TITANIUM ELECTRODES;

MICROELECTROMECHANICAL DEVICES;

EID: 33750134549     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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