Room temperature deposition of silicon by arrayed DC microplasmas

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 765-768

  Wilson, Chester G ^a,b   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN; GLOW DISCHARGES; IMPURITIES; MATHEMATICAL MODELS; MICROELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS; TITANIUM;

DC MICROPLASMAS; GLASS WAFERS; MICROCHIPS; PLASMA GLOW;

SILICON;

EID: 3042745244     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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2. C. Wilson, Y. Gianchandani, "Silicon micro-machining using in-situ DC microplasmas," IEEE J. Microelectromechanical Sys., 10(1) 3/01, pp. 50-4
3. C.G. Wilson, Y.B. Gianchandani R.R. Arslanbekov, V. Kolobov, and A.E. Wendt, "Profiling and Modelling of DC Nitrogen Microplasmas," Jour. Of Applied Physics, 94(5) Sept. 2003, pp 2845-51
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7. C.G. Wilson, A.E. Wendt, and Y.B. Gianchandani, "High Voltage Constraints for Vacuum Packaged Microstructures," IEEE J. Microelectromechanical Sys., (Accepted for publication)
8. C.G. Wilson and Y.B. Gianchandani, "Miniaturized Magnetic DC Nitrogen Microplasmas," IEEE Trans. Plasma Science, (Accepted for publication)
9. C. G. Wilson, Y. B. Gianchandani, "LEd-SpEC: Spectroscopic detection of water contaminants using glow discharge from liquid electrodes," IEEE Transactions on Electron Devices, 49/12, Dec 2002, pp. 2317-2322
10. G. Jenkins, A. Manz, "Optical Emission Detection of Liquid Analytes Using a Micro-Machined DC Glow Discharge Device at Atmospheric Pressure," Proc. Micro Total Analysis Systems, 2001, pp. 349-350
11. B. Mitra, C. G. Wilson, L. Que, Y. G. Gianchandani, "A Microfluidic Ultra-Violet Emission Source for Direct Fluorescence of Tryptophan," Proc. Engineering in Medicine and Biology Soc., Sept 2003, pp. 3380-4.