Major advances in capture pumps in the last 50 years

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 5, 2003, Pages

  Welch, Kimo M ^a  

^a NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMISORPTION; COLLIDING BEAM ACCELERATORS; COMPRESSORS; PARTICLE ACCELERATORS; PRESSURE EFFECTS; SYNCHROTRON RADIATION; VAN DER WAALS FORCES; SPUTTERING; SUBLIMATION; TITANIUM; VACUUM APPLICATIONS;

CAPTURE PUMPS; MOMENTUM TRANSFER PUMPS; NONEVAPORABLE GETTERS; PARTICLE IMPLANTATION; PHYSISORPTION;

VACUUM PUMPS;

EID: 0242593797     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1599873     Document Type: Conference Paper

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