Comparison between rigorous light-scattering methods

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3051, Issue , 1997, Pages 606-619

  Davidson, Mark P ^a   Kleemann, Bernd H ^a   Bischoff, Joerg ^a  

^a Spectel Co   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTEGRAL EQUATIONS; PHOTOLITHOGRAPHY;

LAMELLER GRATINGS; OPTICAL MICROLITHOGRAPHY;

LIGHT SCATTERING;

EID: 0031382539     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.276040     Document Type: Conference Paper

References (29)