Evaluation method on destruction and removal efficiency of perfluorocompounds from semiconductor and display manufacturing

Bulletin of the Korean Chemical Society

Volumn 28, Issue 8, 2007, Pages 1383-1388

  Lee, Jee Yon ^a   Jin, Bok Lee ^a   Dong, Min Moon ^a   Jun, Hyung Souk ^b   Seung, Yeon Lee ^c   Jin, Seog Kim ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

^b SAMSUNG Electronics   (South Korea)

^c Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Destruction and removal efficiency (DRE); Gas mass spectrometer; Global warming; PFC; Scrubber efficiency

Indexed keywords

COMPUTATION THEORY; FLOW RATE; GLOBAL WARMING; SCRUBBERS;

DESTRUCTION AND REMOVAL EFFICIENCY (DRE); GAS MASS SPECTROMETER; SCRUBBER EFFICIENCY;

EMISSION CONTROL;

EID: 34548393219     PISSN: 02532964     EISSN: 12295949     Source Type: Journal    
DOI: 10.5012/bkcs.2007.28.8.1383     Document Type: Article

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