FTIR spectrometers measure scrubber abatement efficiencies

Solid State Technology

Volumn 45, Issue 7, 2002, Pages 157-158+160+162+165

  Li, Shou Nan ^a   Hsu, Jung Nan ^a   Shih, Hui Ya ^a   Lin, Shu Jen ^a   Hong, Jeng Liang ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AIR POLLUTION CONTROL; COST EFFECTIVENESS; EXHAUST GASES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PERFORMANCE; SCRUBBERS;

ABATEMENT EFFICIENCY; DRY ABSORPTION SYSTEMS; WET SCRUBBERS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0036649382     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (5)

1. Reducing PFC gas emissions from CVD chamber cleaning
2. Treating semiconductor emissions with point-of-use abatement systems
3. Measurement of vapor phase organic and inorganic emissions by extractive Fourier Transform Infrared (FTIR) spectroscopy
4. Improved technique for evaluating point-of-use abatement systems
5. Thermochemical and chemical kinetic data for fluorinated hydrocarbons