A review of uses, environmental hazards and recovery/recycle technologies of perfluorocarbons (PFCs) emissions from the semiconductor manufacturing processes

Journal of Loss Prevention in the Process Industries

Volumn 15, Issue 2, 2002, Pages 65-75

  Tsai, Wen Tien ^a   Chen, Horng Ping ^a   Hsien, Wu Yuan ^a  

^a CHIA NAN UNIVERSITY OF PHARMACY AND SCIENCE   (Taiwan)

Author keywords

Environmental hazard; Perflourocarbons (PFCs); Property; Recovery recycle technology; Semiconductor manufacturing

Indexed keywords

ETCHING; EXHAUST GASES; FLUOROCARBONS; HAZARDOUS MATERIALS; MICROELECTRONIC PROCESSING; PARTICULATE EMISSIONS; TOXICITY;

GREENHOUSE GASES;

LOSS PREVENTION;

EMISSION CONTROL; MANUFACTURING; RECYCLING; SEMICONDUCTOR INDUSTRY;

EID: 0036498503     PISSN: 09504230     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0950-4230(01)00067-5     Document Type: Article

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