Electron attachment mass spectrometry as a diagnostics for electronegative gases and plasmas

Review of Scientific Instruments

Volumn 69, Issue 1, 1998, Pages 116-122

  Stoffels, E ^b   Stoffels, W W ^a,b   Tachibana, K ^b  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001510387     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148486     Document Type: Article

References (14)

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