Studies on atmospheric plasma abatement of PFCs

Radiation Physics and Chemistry

Volumn 69, Issue 2, 2004, Pages 113-120

  Radoiu, Marilena T ^a  

^a BOC Edwards   (United Kingdom)

Author keywords

Atmospheric plasmas; Destruction and removal efficiencies; Microwaves; PFCs

Indexed keywords

ATMOSPHERIC PRESSURE; MICROWAVES; MIXTURES; PLASMAS;

ATMOSPHERIC PLASMA ABATEMENT;

RADIATION CHEMISTRY;

CARBON TETRAFLUORIDE; FLUOROCARBON; FLUOROFORM; SULFUR HEXAFLUORIDE; UNCLASSIFIED DRUG;

ARTICLE; ATMOSPHERIC PRESSURE; ATMOSPHERIC RADIOACTIVITY; DESTRUCTION; FLOW RATE; GAS; GAS FLOW; MICROWAVE RADIATION; RACEMIC MIXTURE;

EID: 0348110564     PISSN: 0969806X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0969-806X(03)00455-9     Document Type: Article

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