Preparation and characterization of wafer scale lead zirconate titanate film for MEMS application

Sensors and Actuators, A: Physical

Volumn 139, Issue 1-2 SPEC. ISS., 2007, Pages 152-157

  Lu, Jian ^a   Zhang, Yi ^a   Kobayashi, Takeshi ^a   Maeda, Ryutaro ^a   Mihara, Takashi ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b OLYMPUS CORPORATION   (Japan)

Author keywords

Balance layer; Characterization; MEMS; PZT film; Residual stress; Sol gel; Wafer scale

Indexed keywords

CRYSTALLIZATION; HEAT TREATMENT; LEAD COMPOUNDS; MEMS; PIEZOELECTRIC MATERIALS; RAPID THERMAL ANNEALING; SOL-GEL PROCESS; WSI CIRCUITS;

FILM CRYSTALLIZATION; LEAD ZIRCONATE TITANATE FILMS; PIEZOELECTRIC CONSTANT;

THIN FILMS;

EID: 34548276989     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.10.031     Document Type: Article

References (16)

1. Filhol F., Defay E., Divoux C., Zinck C., and Delaye M.-T. Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning. Sens. Actuators A 123/124 (2005) 483-489
2. Yang Z.C., and Wang Q.M. Transient response of piezoelectric thin-film vibration sensor under pulse excitation. J. Appl. Phys. 99 (2006) 014107
3. Hsu Y.C., Wu C.C., Lee C.C., Cao G.Z., and Shen I.Y. Demonstration and characterization of PZT thin-film sensors and actuators for meso- and micro-structures. Sens. Actuators A 116 (2004) 369-377
4. Muralt P. PZT thin films for micro sensors and actuators: where do we stand?. IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 47 (2000) 903-915
5. J. Lu, T. Ikehara, T. Kobayashi, R. Maeda, T. Mihara, Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film, Microsyst. Technol., in press.
6. 3 thin films fabricated by a sol-gel process. Appl. Phys. Lett. 82 (2003) 4540-4542
7. 3/Pt thin-film stacks for integrated ferroelectric capacitors. J. Appl. Phys. 78 (1995) 1926-1933
8. 3 thick film micro actuator. Jpn. J. Appl. Phys. 37 (1998) 7116-7119
9. Lian L., and Sottos N.R. Stress effects in sol-gel derived ferroelectric thin films. J. Appl. Phys. 95 (2004) 629-634
10. Kobayashi T., Ichiki M., Tsaur J., and Maeda R. Effects of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition. Thin Solid Films 489 (2005) 74-78
11. Bahr D.F., Robach J.S., Wright J.S., Francis L.F., and Gerberich W.W. Mechanical deformation of PZT thin films for MEMS applications. Mater. Sci. Eng. A 259 (1999) 126-131
12. Song Z., Chong N., Chan L.H.W., Choy C.L., and Lin C. Thermal stability of electrode stacks for application in oxide film devices. Thin Solid Films 406 (2002) 268-274
13. Kim K., Yoo M., Lee S., Bae D.K.S., and Lee M. Residual stresses in the electrode of Pt/Ti for the thermal detector with thin-film structure. Proceedings of the 12th IEEE International Symposium on Applications of Ferroelectrics. Hawaii, USA, July 21 to August 2 (2000) 929-932
14. Lee C., Itoh T., Maeda R., and Suga T. Characterization of micromachined piezoelectric PZT force sensors for dynamic SFM. Rev. Sci. Instrum. 68 (1997) 2091-2099
15. DeVoe D.L. Piezoelectric thin film micromechanical beam resonators. Sens. Actuators A 88 (2001) 263-272
16. Yimnirum R., Laosiritaworn Y., and Wongsaenmai S. Effect of uniaxial compressive pre-stress on ferroelectric properties of soft PZT ceramics. J. Phys. D: Appl. Phys. 39 (2006) 759-764