Transient response of piezoelectric thin-film vibration sensor under pulse excitation

Journal of Applied Physics

Volumn 99, Issue 1, 2006, Pages

  Yang, Zhaochun ^a   Wang, Qing Ming ^a  

^a University of Pittsburgh   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CENTRAL SEISMIC MASS; PIEZOELECTRIC THIN-FILM VIBRATION SENSOR; PULSE EXCITATION; SUSPENDED FLEXURAL PIEZOELECTRIC LEAD ZIRCONATE TITANATE-ON-SILICON BEAM;

ELECTRIC POTENTIAL; LEAD COMPOUNDS; PIEZOELECTRIC MATERIALS; SENSORS; SILICON; TRANSDUCERS;

THIN FILMS;

EID: 30844445612     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2161412     Document Type: Article

References (18)

1. G. Gautschi, Piezoelectric Sensorics: Force, Strain, Pressure, Acceleration and Acoustic Emission Sensors, Materials and Amplifiers (Springer, Berlin, 2002).
2. K. Uchino, Piezoelectric Actuators and Ultrasonic Motors (Kluwer Academic Publishers, Boston, 1996).
3. G. Macdonald, Sens. Actuators, A 21, 303 (1990).
4. T. R. Licht and P. R. Scheeper, Trans. IEE. Japan. 116, 256 (1996).
5. N. Yazdi, F. Ayazi, and K. Najafi, Proc. IEEE 86, 1640 (1998).
6. K. Kunz, P. Enoksson, and G. Stemme, Sens. Actuators, A 92, 156 (2001).
7. S. P. Beeby, N. J. Grabham, and N. M. White, Sens. Actuators, A 92, 168 (2001).
8. V. K. Varadan, V. V. Varadan and H. Subramanian, Sens. Actuators, A 90, 7 (2001).
9. D. Crescini, D. Marioli, E. Sardini, and A. Taroni, Sens. Actuators, A 87, 131 (2001).
10. L. Ries and W. Smith, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 46, 1352 (1999).
11. D. Eicher, M. Giousouf, and W. von Munch, Sens. Actuators, A, 75, 247 (1999).
12. J. Yu and C. Lan, Sens. Actuators, A 88, 178 (2001).
13. B. Xu, L. E. Cross, and J. Bernstein, Thin Solid Films 377, 712 (2000).
14. V. Ferrari, D. Marioli, and A. Taroni, Sens. Actuators, A 92, 182 (2001).
15. Q. Wang, Z. Yang, F. Li, and P. Smolinski, Sens. Actuators, A 113, 1 (2004).
16. I. Jung and Y. Roh, Sens. Actuators, A 69, 259 (1998).
17. J. M. Gere and S. P. Timoshenko, Mechanics of Materials (PWS-KENT, Boston, 1984).
18. W. T. Thomson and M. D. Dahleh, Theory of Vibration with Application (Prentice Hall, Englewood Cliffs, NJ, 1993).