Deposition and patterning technique for realization of Pb(Zr0.52, Ti0.48)O3 thick film micro actuator

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 12 B, 1998, Pages 7116-7119

  Maeda, Ryutaro ^a   Wang, Zhanjie ^a   Chu, Jiaru ^a,b   Akedo, Jun ^a   Ichiki, Masaaki ^a   Yonekubo, So ^a,c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b R and D Institute for Photonics Engineering

^c Precision Technology Research Institute of Nagano Prefecture   (Japan)

Author keywords

Actuator; Excimer laser ablation; Jet molding; Piezoelecttic; PZT; Sol gel; Thick film

Indexed keywords

EID: 19644376470     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.7116     Document Type: Article

References (6)

1. O. Auciello and R. Ramesh (ed.): Electroceramic Thin Films, Part I: Processing, MRS Bull., Special Issue June 1996.
2. C. Lee, S Kawano, T. Itoh and T. Suga: J. Mater. Sci. 31 (1996) 4559.
3. R. Maeda and K. Kikuchi: Surf. Eng. 13 (1997) 71.
4. J. Akedo, M. Ichiki, K. Kikuchi and R. Maeda, Proc of IEEE Workshop of MEMS (1997) p. 135.
5. A. Schroth, M. Ichiki, R. Maeda and J. Akedo: Proc. SPIE 3242 (1997) 380.
6. C. Lee, R. Maeda, T. Itoh and T. Suga, Rev. Sci. Instrum. 68 (1997) 2091.