메뉴 건너뛰기




Volumn 99, Issue 8, 2007, Pages

Control of schottky barrier heights on high-K gate dielectrics for future complementary metal-oxide semiconductor devices

Author keywords

[No Author keywords available]

Indexed keywords

FERMI LEVEL; GATE DIELECTRICS; INTERFACES (MATERIALS); MOS DEVICES; PERMITTIVITY; WORK FUNCTION;

EID: 34548273066     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.99.086805     Document Type: Article
Times cited : (55)

References (33)
  • 3
    • 4243219492 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.82.4050
    • A. Bogicevic and D.R. Jennison, Phys. Rev. Lett. 82, 4050 (1999). PRLTAO 0031-9007 10.1103/PhysRevLett.82.4050
    • (1999) Phys. Rev. Lett. , vol.82 , pp. 4050
    • Bogicevic, A.1    Jennison, D.R.2
  • 4
    • 9644301655 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.84.3650
    • X.G. Wang, A. Chaka, and M. Scheffler, Phys. Rev. Lett. 84, 3650 (2000). PRLTAO 0031-9007 10.1103/PhysRevLett.84.3650
    • (2000) Phys. Rev. Lett. , vol.84 , pp. 3650
    • Wang, X.G.1    Chaka, A.2    Scheffler, M.3
  • 6
    • 0007507455 scopus 로고    scopus 로고
    • JCOMEL 0953-8984 10.1088/0953-8984/8/32/003
    • M.W. Finnis, J. Phys. Condens. Matter JCOMEL 0953-8984 8, 5811 (1996). 10.1088/0953-8984/8/32/003
    • (1996) J. Phys. Condens. Matter , vol.8 , pp. 5811
    • Finnis, M.W.1
  • 7
    • 33646875269 scopus 로고    scopus 로고
    • MATOBY 0096-4867 10.1016/S1369-7021(06)71541-3
    • B.H. Lee, Mater. Today 9, 32 (2006). MATOBY 0096-4867 10.1016/S1369-7021(06)71541-3
    • (2006) Mater. Today , vol.9 , pp. 32
    • Lee, B.H.1
  • 8
    • 31044455312 scopus 로고    scopus 로고
    • RPPHAG 0034-4885 10.1088/0034-4885/69/2/R02
    • J. Robertson, Rep. Prog. Phys. 69, 327 (2006); RPPHAG 0034-4885 10.1088/0034-4885/69/2/R02
    • (2006) Rep. Prog. Phys. , vol.69 , pp. 327
    • Robertson, J.1
  • 9
    • 0034187380 scopus 로고    scopus 로고
    • JVTBD9 0734-211X 10.1116/1.591472
    • J. Robertson, J. Vac. Sci. Technol. B JVTBD9 0734-211X 18, 1785 (2000). 10.1116/1.591472
    • (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 1785
    • Robertson, J.1
  • 10
    • 34548237973 scopus 로고    scopus 로고
    • Int. Electron Devices Meeting
    • J.K. Schaeffer, in Tech Digest (Int. Electron Devices Meeting, 2004), p. 287.
    • (2004) Tech Digest , pp. 287
    • Schaeffer, J.K.1
  • 12
    • 0037115703 scopus 로고    scopus 로고
    • JAPIAU 0021-8979 10.1063/1.1521517
    • Y.C. Yeo, T.J. King, and C. Hu, J. Appl. Phys. JAPIAU 0021-8979 92, 7266 (2002). 10.1063/1.1521517
    • (2002) J. Appl. Phys. , vol.92 , pp. 7266
    • Yeo, Y.C.1    King, T.J.2    Hu, C.3
  • 13
    • 34548290625 scopus 로고    scopus 로고
    • http://www.intel.com/technology/silicon/45nm_technology.htm.
  • 14
    • 33847641358 scopus 로고    scopus 로고
    • APPLAB 0003-6951 10.1063/1.2709642
    • S. Guha, Appl. Phys. Lett. APPLAB 0003-6951 90, 092902 (2007). 10.1063/1.2709642
    • (2007) Appl. Phys. Lett. , vol.90 , pp. 092902
    • Guha, S.1
  • 15
    • 33845419668 scopus 로고    scopus 로고
    • APPLAB 0003-6951 10.1063/1.2396918
    • H.N. AlShareef, Appl. Phys. Lett. APPLAB 0003-6951 89, 232103 (2006). 10.1063/1.2396918
    • (2006) Appl. Phys. Lett. , vol.89 , pp. 232103
    • Alshareef, H.N.1
  • 16
    • 34447278109 scopus 로고    scopus 로고
    • EDLEDZ 0741-3106 10.1109/LED.2007.891757
    • X.P. Wang, IEEE Electron Device Lett. EDLEDZ 0741-3106 28, 258 (2007). 10.1109/LED.2007.891757
    • (2007) IEEE Electron Device Lett. , vol.28 , pp. 258
    • Wang, X.P.1
  • 17
    • 33645154999 scopus 로고    scopus 로고
    • APPLAB 0003-6951 10.1063/1.2186517
    • H.N. Alshareef, Appl. Phys. Lett. APPLAB 0003-6951 88, 112114 (2006). 10.1063/1.2186517
    • (2006) Appl. Phys. Lett. , vol.88 , pp. 112114
    • Alshareef, H.N.1
  • 18
    • 5844355552 scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.58.1260
    • W. Mönch, Phys. Rev. Lett. 58 1260 (1987). PRLTAO 0031-9007 10.1103/PhysRevLett.58.1260
    • (1987) Phys. Rev. Lett. , vol.58 , pp. 1260
    • Mönch, W.1
  • 19
    • 0342955088 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.84.6078
    • R.T. Tung, Phys. Rev. Lett. 84 6078 (2000). PRLTAO 0031-9007 10.1103/PhysRevLett.84.6078
    • (2000) Phys. Rev. Lett. , vol.84 , pp. 6078
    • Tung, R.T.1
  • 20
    • 4243672394 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.89.266101
    • V. Fiorentini and G. Gulleri, Phys. Rev. Lett. 89, 266101 (2002). PRLTAO 0031-9007 10.1103/PhysRevLett.89.266101
    • (2002) Phys. Rev. Lett. , vol.89 , pp. 266101
    • Fiorentini, V.1    Gulleri, G.2
  • 21
    • 0344228772 scopus 로고
    • edited by Ehrenreich (Academic Press, Oxford
    • D.G. Pettifor, Solid State Physics, edited by, Ehrenreich, (Academic Press, Oxford, 1987) Vol. 40, p. 43.
    • (1987) Solid State Physics , vol.40 , pp. 43
    • Pettifor, D.G.1
  • 22
    • 36149043992 scopus 로고
    • JPSOAW 0022-3719 10.1088/0022-3719/12/22/036
    • P.W. Tasker, J. Phys. C 12, 4977 (1979). JPSOAW 0022-3719 10.1088/0022-3719/12/22/036
    • (1979) J. Phys. C , vol.12 , pp. 4977
    • Tasker, P.W.1
  • 23
    • 1642330111 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.92.057601
    • P.W. Peacock, and J. Robertson, Phys. Rev. Lett. PRLTAO 0031-9007 92 057601 (2004). 10.1103/PhysRevLett.92.057601
    • (2004) Phys. Rev. Lett. , vol.92 , pp. 057601
    • Peacock, P.W.1    Robertson, J.2
  • 24
    • 24044529321 scopus 로고
    • JPSOAW 0022-3719 10.1088/0022-3719/18/19/001
    • A.M. Stoneham and P.W. Tasker, J. Phys. C 18 L543 (1985). JPSOAW 0022-3719 10.1088/0022-3719/18/19/001
    • (1985) J. Phys. C , vol.18 , pp. 543
    • Stoneham, A.M.1    Tasker, P.W.2
  • 25
    • 0037104427 scopus 로고    scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.66.085417
    • J. Goniakowski and C. Noguera, Phys. Rev. B PRBMDO 0163-1829 66 085417 (2002); 10.1103/PhysRevB.66.085417
    • (2002) Phys. Rev. B , vol.66 , pp. 085417
    • Goniakowski, J.1    Noguera, C.2
  • 26
    • 1042277464 scopus 로고    scopus 로고
    • INSCE9 0927-7056 10.1023/B:INTS.0000012298.34540.50
    • J. Goniakowski C. Noguera Interface Sci. 12, 93 (2004). INSCE9 0927-7056 10.1023/B:INTS.0000012298.34540.50
    • (2004) Interface Sci. , vol.12 , pp. 93
    • Goniakowski, J.1    Noguera, C.2
  • 28
    • 0035309829 scopus 로고    scopus 로고
    • JCPSA6 0021-9606 10.1063/1.1352079
    • A Christensen and E.A Carter, J. Chem. Phys. 114, 5816 (2001). JCPSA6 0021-9606 10.1063/1.1352079
    • (2001) J. Chem. Phys. , vol.114 , pp. 5816
    • Christensen, A.1    Carter, E.A.2
  • 30
    • 0017556846 scopus 로고
    • JAPIAU 0021-8979 10.1063/1.323539
    • H.B. Michaelson, J. Appl. Phys. JAPIAU 0021-8979 48, 4729 (1977). 10.1063/1.323539
    • (1977) J. Appl. Phys. , vol.48 , pp. 4729
    • Michaelson, H.B.1
  • 32
    • 33747624147 scopus 로고    scopus 로고
    • PRBMDO 0163-1829 10.1103/PhysRevB.74.085310
    • A.A. Demkov, Phys. Rev. B PRBMDO 0163-1829 74, 085310 (2006). 10.1103/PhysRevB.74.085310
    • (2006) Phys. Rev. B , vol.74 , pp. 085310
    • Demkov, A.A.1
  • 33
    • 34547917220 scopus 로고    scopus 로고
    • JAPNDE y0021-4922 10.1143/JJAP.45.L1289
    • Y. Akasaka, Jpn. J. Appl. Phys. JAPNDE y0021-4922 45, L1289 (2006). 10.1143/JJAP.45.L1289
    • (2006) Jpn. J. Appl. Phys. , vol.45 , pp. 1289
    • Akasaka, Y.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.