Low temperature a-Si:H photodiodes and flexible image sensor arrays patterned by digital lithography

Applied Physics Letters

Volumn 91, Issue 6, 2007, Pages

  Ng, Tse Nga ^a   Lujan, Rene A ^a   Sambandan, Sanjiv ^a   Street, Robert A ^a   Limb, Scott ^a   Wong, William S ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE SENSORS; LEAKAGE CURRENTS; LITHOGRAPHY; LOW TEMPERATURE OPERATIONS; SILICON; THIN FILM TRANSISTORS;

DIGITAL LITHOGRAPHY; POLYETHYLENE NAPHTHALATE SUBSTRATES;

PHOTODIODES;

EID: 34547892299     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2767981     Document Type: Article

References (18)

1. J. R. Sheats, Proc. SPIE 4688, 240 (2002).
2. K. Jain, M. Klosner, M. Zemel, and S. Raghunandan, Proc. IEEE 93, 1500 (2005).
3. L. Zhou, S. Jung, E. Brandon, and T. N. Jackson, IEEE Trans. Electron Devices 53, 380 (2006).
4. I.-C. Cheng, A. Kattarnis, K. Long, J. C. Sturm, and S. Wagner, J. Soc. Inf. Disp. 13, 563 (2005).
5. Z. Suo, E. Y. Ma, H. Gleskova, and S. Wagner, Appl. Phys. Lett. 74, 1177 (1999).
6. H. Gleskova, I.-C. Cheng, S. Wagner, and Z. Suo, Appl. Phys. Lett. 88, 011905 (2006).
7. A. Sazonov, D. Stryahilev, C.-H. Lee, and A. Nathan, Proc. IEEE 93, 1420 (2005).
8. H. Gleskova and S. Wagner, IEEE Trans. Electron Devices 48, 1667 (2001).
9. Q. Wang, S. Ward, A. Duda, J. Hu, P. Stradins, R. S. Crandall, H. M. Branz, C. Perlov, W. Jackson, P. Mei, and C. Taussig, Appl. Phys. Lett. 85, 2122 (2004).
10. K. H. Kim, Y. Vygranenko, M. Bedzyk, J. h. Chang, T. C. Chuang, D. Striakhilev, A. Nathan, G. Heiler, and T. Tredwell, Mater. Res. Soc. Symp. Proc. 989, A19.5 (2007).
11. R. A. Street, Hydrogenated Amorphous Silicon (Cambridge University Press, New York, 1991), pp. 267-320.
12. Technology and Applications of Amorphous Silicon, edited by, R. A. Street, (Springer, New York, 2000), Vol. 37, pp. 147-221.
13. M. A. Kroon and R. A. C. M. M. van Swaaij, J. Appl. Phys. 90, 994 (2001).
14. H. Gleskova, S. Wagner, and D. S. Shen, J. Non-Cryst. Solids 227-230, 1217 (1998).
15. W. S. Wong, S. Ready, R. Matusiak, S. D. White, J.-P. Lu, J. Ho, and R. A. Street, Appl. Phys. Lett. 80, 610 (2002).
16. W. S. Wong, S. E. Ready, J.-P. Lu, and R. A. Street, IEEE Electron Device Lett. 24, 577 (2003).
17. W. S. Wong, T. N. Ng, M. L. Chabinyc, R. A. Lujan, R. B. Apte, S. Limb, and R. A. Street, Mater. Res. Soc. Symp. Proc. 989, A9.3 (2007).
18. W. S. Wong, R. Lujan, J. H. Daniel, and S. Limb, J. Non-Cryst. Solids 352, 1981 (2006).