Flexible substrate micro-crystalline silicon and gated amorphous silicon strain sensors

IEEE Transactions on Electron Devices

Volumn 53, Issue 2, 2006, Pages 380-385

  Zhou, Lisong ^a   Jung, Soyoun ^a   Brandon, Erik ^b   Jackson, Thomas N ^a  

^a The Pennsylvania State University   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Flexible electronics; Semiconductor devices; Strain measurement; Strain sensors; Thin films; Thin film transistors (TFTs)

Indexed keywords

AMORPHOUS SILICON; CRYSTALLINE MATERIALS; POLYIMIDES; SEMICONDUCTOR DEVICES; STRAIN MEASUREMENT; SUBSTRATES; THIN FILM TRANSISTORS;

FLEXIBLE ELECTRONICS; GATED AMORPHOUS SILICON STRAIN SENSORS; STRAIN SENSORS;

SILICON SENSORS;

EID: 31744442998     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2005.861727     Document Type: Article

References (8)

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