Thermomechanical criteria for overlay alignment in flexible thin-film electronic circuits

Applied Physics Letters

Volumn 88, Issue 1, 2006, Pages

  Gleskova, Helena ^a   Cheng, I Chun ^a   Wagner, Sigurd ^a   Suo, Zhigang ^b  

^a Princeton University   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM DEPOSITION; OVERLAY ALIGNMENT; PHOTOMASKS; THIN-FILM ELECTRONIC CIRCUITS;

DEPOSITION; FILM GROWTH; SUBSTRATES; TENSILE STRESS; THIN FILMS;

NETWORKS (CIRCUITS);

EID: 33645531090     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2161391     Document Type: Article

References (4)

1. Flexible Flat Panel Displays, edited by, G. P. Crawford, (Wiley, Chichester, 2005).
2. Z. Suo, E. Y. Ma, H. Gleskova, and S. Wagner, Appl. Phys. Lett. 74, 1177 (1999).
3. I.-C. Cheng, A. Kattamis, K. Long, J. C. Sturm, and S. Wagner, J. SID 13, 563 (2005).
4. L. B. Freund and S. Suresh, Thin Film Materials (Cambridge University Press, New York, 2003).