Flexible electronics and displays: High-resolution, roll-to-roll, projection lithography and photoablation processing technologies for high-throughput production

Proceedings of the IEEE

Volumn 93, Issue 8, 2005, Pages 1500-1510

  Jain, Kanti ^a   Klosner, Marc ^a   Zemel, Marc ^a   Raghunandan, Shyam ^a  

^a Anvik Corporation   (United States)

Author keywords

Chip carriers; Flexible circuit boards; Flexible displays; Image scaling; Large area exposure; Macroelectronics; Photoablatian patterning; Projection imaging; Roll to roll lithography; Seamless scanning

Indexed keywords

AMORPHOUS SILICON; INTEGRATED CIRCUITS; LITHOGRAPHY; MICROELECTRONICS; MICROPROCESSOR CHIPS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR MATERIALS; THERMAL EXPANSION; THIN FILM TRANSISTORS;

CHIP CARRIERS; FLEXIBLE CIRCUIT BOARDS; FLEXIBLE DISPLAYS; IMAGE SCALING; LARGE-AREA EXPOSURE; MACROELECTRONICS; PHOTOABLATION PATTERNING;

ELECTRONIC EQUIPMENT;

EID: 23744435844     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPROC.2005.851505     Document Type: Review

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