Hydrogenated amorphous silicon thin-film transistor arrays fabricated by digital lithography

IEEE Electron Device Letters

Volumn 24, Issue 9, 2003, Pages 577-579

  Wong, William S ^a   Ready, Steven E ^a   Lu, Jeng Ping ^a   Street, Robert A ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

Active matrix arrays; Amorphous silicon; Jet printing; Thin film transistor (TFT)

Indexed keywords

AMORPHOUS SILICON; CARRIER MOBILITY; HYDROGENATION; PHOTOLITHOGRAPHY; PRINTING; SEMICONDUCTOR DEVICE MANUFACTURE; THRESHOLD VOLTAGE;

ACTIVE MATRIX ARRAYS; DIGITAL LITHOGRAPHY; JET PRINTING;

THIN FILM TRANSISTORS;

EID: 0141595163     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2003.815939     Document Type: Letter

References (15)

1. R. A. Street, Ed., Technology and Applications of Amorphous Silicon. Berlin, Germany: Springer-Verlag, 2000.
2. D. A. Pardo, G. E. Jabbour, and N. Peyghambarian, "Application of screen printing in the fabrication of organic light-emitting devices," Adv. Mater., vol. 12, no. 17, pp. 1249-1252, 2000.
3. J. Birnstock, J. Blässing, A. Hunze, M. Scheffel, M. Stößel, K. Heuser, G. Wittmann, J. Wörle, and A. Winnacker, "Screen-printed passive matrix displays based on light-emitting polymers," Appl. Phys. Lett., vol. 78, no. 24, pp. 3905-3907, 2001.
4. Y. Xia and G. M. Whitesides, "Soft lithography," Angew. Chem. Int. Ed., vol. 1998, pp. 550-575, 1998.
5. D. B. Wolfe, J. C. Love, K. E. Paul, M. L. Chabinyc, and G. M. Whitesides, "Fabrication of palladium-based microelectronic devices by microcontact printing," Appl. Phys. Lett., vol. 80, no. 12, pp. 2222-2224, 2002.
6. H. Sirringhaus, T. Kawase, R. H. Friend, T. Shimoda, M. Inbasekaran, W. Wu, and E. P. Woo, "High-resolution inkjet printing of all-polymer transistor circuits," Science, vol. 290, no. 5499, pp. 2123-2126, 2000.
7. S.-C. Chang, J. Bharathan, Y. Yang, R. Helgeson, F. Wudl, M. B. Ramey, and J. R. Reynolds, "Dual-color polymer light-emitting pixels processed by hybrid inkjet printing," Appl. Phys. Lett., vol. 73, no. 18, pp. 2561-2563, 1998.
8. G. Perçin, T. S. Lundgren, and B. T. Khuri-Yakub, "Controlled ink-jet printing and deposition of organic polymers and solid particles," Appl. Phys. Lett., vol. 73, no. 16, pp. 2375-2377, 1998.
9. T. R. Hebner, C. C. Wu, D. Marcy, M. H. Lu, and J. C. Sturm, "Ink-jet printing of doped polymers for organic light emitting devices," Appl. Phys. Lett., vol. 72, no. 5, pp. 519-521, 1998.
10. H. Gleskova, S. Wagner, and D. Shen, "Electrophotographic patterning of thin-film silicon on glass foil," IEEE Electron Device Lett., vol. 16, pp. 418-420, 1995.
11. H. Gleskova, S. Wagner, and D. S. Shen, "Photoresist-free fabrication process for a Si-H thin film transistor," J. Non-Cryst. Solids, pt. B, vol. 227-230, pp. 1217-1220, 1998.
12. E. Y. Ma and S. Wagner, "a-Si:H thin film transistors on rollable 25 μm thick steel foil," Mat. Res. Soc. Proc., vol. 507, pp. 13-18, 1998.
13. B. Hadimioglu, S. Elrod, and R. Sprague, "Acoustic ink printing: an application of ultrasonics for photographic quality printing at high speed," in Proc. 2001 IEEE Ultrason. Symp., vol. 1, 2001, pp. 627-635.
14. S. A. Elrod, B. Hadimioglu, B. T. Khuri-Yakub, E. G. Rawson, E. Richley, C. F. Quate, N. N. Mansour, and T. S. Lundgren, "Nozzleless droplet formation with focused acoustic beams," J. Appl. Phys., vol. 65, no. 9, pp. 3441-3447, 1989.
15. W. S. Wong, S. Ready, R. Matusiak, S. D. White, J.-P. Lu, J. Ho, and R. A. Street, "Amorphous silicon thin-film transistors and arrays fabricated by jet printing," Appl. Phys. Lett., vol. 80, no. 4, pp. 610-612.