Single crystal silicon cantilever-based RF-MEMS switches using surface processing on SOI

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 187-190

  Nakatani, T ^a   Nguyen, A T ^a   Shimanouchi, T ^a   Imai, M ^a   Ueda, S ^a   Sawaki, I ^a   Satoh, Y ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BRIDGE ELECTRODES; INSERTION LOSS; SINGLE CRYSTAL SILICON (SCS) CANTILEVERS; WAFER TRANSFER;

CANTILEVER BEAMS; ELECTRIC SWITCHES; ELECTRODES; ELECTROPLATING; SILICON; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; SUBSTRATES;

MICROELECTROMECHANICAL DEVICES;

EID: 26844504139     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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