A hybrid approach to low-voltage MEMS switches

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 859-862

  Borwick, R L ^a   Stupar, P A ^a   DeNatale, J ^a  

^a ROCKWELL SCIENTIFIC COMPANY   (United States)

Author keywords

Capacitors; Contacts; Electrostatics; Lorentz covariance; Low voltage; Magnetic fields; Magnetic levitation; Microrelays; Microswitches; Switches

Indexed keywords

ACTUATORS; CAPACITORS; CONTACTS (FLUID MECHANICS); DISSOCIATION; ELECTRIC SWITCHES; ELECTROSTATICS; LORENTZ FORCE; MAGNETIC FIELDS; MAGNETIC LEVITATION; MAGNETIC LEVITATION VEHICLES; MAGNETISM; MICROSYSTEMS; SWITCHES; TRANSDUCERS;

LATERAL DISPLACEMENTS; LORENTZ COVARIANCES; LOW VOLTAGES; MECHANICAL PERFORMANCE; MICRORELAYS; MICROSWITCHES; PERMANENT MAGNETIC FIELDS; RESTORING FORCES;

SOLID-STATE SENSORS;

EID: 33748788336     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215610     Document Type: Conference Paper

References (4)

1. R.E. Mihailovich, M. Kim, J.B. Hacker, E.A. Sovero, J. Studer, J.A. Higgins, and J.F. DeNatale, "MEM Relay for reconfigurable RF circuits," IEEE Wireless Comp. Lett., vol. 11, pp. 53-55, Feb. 2001
2. D Hah, E Yoon, and S Hong, "A Low-Voltage Actuated Micromachined Microwave Switch Using Torsion Springs and Leverage," IEEE Transactions on Microwave Theory and Techniques, vol. 48, no. 12, pp. 2540-2545, Dec. 2000.
3. Y. Wang, Z. Li, D.T. McCormick, and N.C. Tien, "Low-Voltage Lateral-Contact Microrelays for RF Applications," Technical Digest of the IEEE Conference on Micro Electro Mechanical Systems, 2002, pp.645-648.
4. R. L. Borwick, P. A. Stupar, J. DeNatale, R. Anderson, C. Tsai, K. Garret, R. Erlandson "A High Q, Large Tuning Range MEMS Capacitor for RF Filter Systems," Sensors and Actuators A 103, 2003, pp. 33-41.