Contact printing for direct metallic pattern transfer based on pulsed infrared laser heating

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages 1252-1256

  Chen, Chun Hung ^a   Lee, Yung Chun ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM COMPOUNDS; LASER HEATING; METALLIC FILMS;

ARRAY-DOT PATTERNS; CONTACT PRESSURE; DIRECT METALLIC PATTERN TRANSFER; PULSED INFRARED LASER HEATING;

PRINTING;

CHROMIUM COMPOUNDS; HEATING; PRINTING; THIN FILMS;

EID: 34547600992     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/006     Document Type: Article

References (12)

1. Chou S Y, Krauss P R and Renstrom P J 1996 Science 272 85-7
2. Chou S Y and Krauss P R 1997 Microelectron. Eng. 35 237-40
3. Guo L, Krauss P R and Chou S Y 1997 Appl. Phys. Lett. 71 1881-3
4. Zhang W and Chou S Y 2003 Appl. Phys. Lett. 83 1632-4
5. Colburn M et al 1999 Proc. SPIE 3676 379-89
6. Stewart M D, Johnson S C, Sreenivasan S V, Resnick D J and Willson C G 2005 J. Microlith. Microfab. Microsyst. 4 1-6
7. Xia Y and Whitesides G M 1998 Annu. Rev. Mater. Sci. 37 550-75
8. Wolfe D B, Love J C, Gates B D, Whitesides G M, Conroy R S and Prentiss M 2004 Appl. Phys. Lett. 84 1623-5
9. Xia Y, Mrksich M, Kim E and Whitesides G M 1995 J. Am. Chem. Soc. 117 9576-7
10. Xia Y, Rogers J A, Paul K E and Whitesides G M 1999 Chem. Rev. 99 1823-48
11. Jung G Y, Li Z, Wu W, Chen Y, Olynick D L, Wang S Y, Tong W M and Williams R S 2005 Langmuir 21 1158-61
12. Poate J M and Mayer J W 1982 Laser Annealing of Semiconductors (New York: Academic) chapters 3 and 4