A strong reduction in the density of near-interface traps at the SiO 2/4H-SiC interface by sodium enhanced oxidation

Journal of Applied Physics

Volumn 101, Issue 12, 2007, Pages

  Allerstam, F ^a   Olafsson H O ^a   Gudjonsson G ^a   Dochev, D ^a   Sveinbjornsson E O ^a   Rodle T ^b   Jos, R ^b  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b NXP SEMICONDUCTORS   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY LEVELS; FIELD EFFECT TRANSISTORS; INTERFACES (MATERIALS); MOS DEVICES; SILICON CARBIDE; SINTERING;

CHANNEL MOBILITIES; CONDUCTION BAND EDGE; NEAR-INTERFACE TRAPS;

ELECTRON TRAPS;

EID: 34547409867     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2745321     Document Type: Article

References (17)

1. J. A. Cooper, Jr. and A. Agarwal, Proc. IEEE 90, 956 (2002).
2. V. V. Afanasev, A. Stesmans, F. Ciobanu, G. Pensl, K. Y. Cheong, and S. Dimitrijev, Appl. Phys. Lett. 82, 568 (2003).
3. G. Y. Chung, C. C. Tin, J. R. Williams, K. McDonald, M. Di Ventra, S. T. Pantelides, L. C. Feldman, and R. A. Weller, Appl. Phys. Lett. 76, 1713 (2000).
4. V. V. Afanasev, A. Stesmans, M. Bassler, G. Pensl, and M. J. Schulz, Appl. Phys. Lett. 76, 336 (2000).
5. T. E. Rudenko, I. N. Osiyuk, I. P. Tyagulski, H. Ö. Ólafsson, and E. Ö. Sveinbjörnsson, Solid-State Electron. 49, 545 (2005).
6. S. Dimitrijev, P. Tanner, and H. B. Harrison, Microelectron. Reliab. 39, 441 (1999).
7. G. Y. Chung, IEEE Electron Device Lett. 22, 176 (2001).
8. J. M. Knaup, P. Deak, Th. Frauenheim, A. Gali, Z. Hajnal, and W. J. Choyke, Phys. Rev. B 72 115323 (2005).
9. K. McDonald, R. A. Weller, S. T. Pantelides, L. C. Feldman, G. Y. Chung, C. C. Tin, and J. R. Williams, J. Appl. Phys. 93, 2719 (2003).
10. R. Schörner, P. Friedrichs, D. Peters, D. Stephani, S. Dimitrijev, and P. Jamet, Appl. Phys. Lett. 80, 4253 (2002).
11. G. Gudjonsson, H. Ö. Ólafsson, F. Allerstam, P.-Å. Nilsson, E. Ö. Sveinbjörnsson, H. Zirath, T. Rödle, and R. Jos, IEEE Electron Device Lett. 26, 96 (2005).
12. H. Ö. Ólafsson, Ph.D. thesis, Chalmers University of Technology, 2004.
13. H. A. Mar and J. G. Simmons, Solid-State Electron. 17, 131 (1974).
14. E. Opila, J. Am. Ceram. Soc. 78, 1107 (1995).
15. Z. Zheng, R. E. Tressler, and K. E. Spear, Corros. Sci. 33, 545 (1992).
16. D. K. Schroder, Semiconductor Material and Device Characterization, 2nd ed. (Wiley, New York, 1998).
17. E. Pippel, J. Woltersdorf, H. Ö. Olafsson, and E. Ö. Sveinbjörnsson, J. Appl. Phys. 97, 034302 (2005).