Stable PZT sol for preparing reproducible high-permittivity perovskite-based thin films

Journal of Sol-Gel Science and Technology

Volumn 43, Issue 2, 2007, Pages 213-221

  Belleville, Philippe ^a   Bigarre, Janick ^a   Boy, Philippe ^a   Montouillout, Yves ^a  

^a CEA LE RIPAULT   (France)

Author keywords

Dielectric measurements; PZT thin films; Reproducibility; Ripening; Stable sol; Viscosity

Indexed keywords

ANNEALING; DIELECTRIC MATERIALS; FERROELECTRIC CERAMICS; PERMITTIVITY; PEROVSKITE; SOL-GEL PROCESS; THERMAL EFFECTS; THIN FILM DEVICES; VISCOSITY;

DIELECTRIC MEASUREMENTS; PZT SOL; PZT THIN FILMS; STABLE SOL;

THIN FILMS;

EID: 34547179929     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10971-007-1580-4     Document Type: Article

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