Scaling issues of Pb(Zr,Ti)O3 capacitor stack for high density FeRAM devices

Journal of the Korean Physical Society

Volumn 42, Issue SUPPL., 2003, Pages

  Kim, Seung Hyun ^a   Koo, Chang Young ^a   Park, Dong Yeon ^a   Lee, Dong Su ^a   Yeom, Jung Hoon ^a   Ha, Jowoong ^a   Lim, Jieun ^b   Hwang, Cheol Seong ^b  

^a INOSTEK Inc   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

FeRAM; Ferroelectric; Imprint; Pb(Zr, Ti)O3 thin films; Scaling of thickness

Indexed keywords

EID: 0842342313     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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