Pyroelectric thin film presence detector arrays with micromachined pixels

Integrated Ferroelectrics

Volumn 44, Issue , 2002, Pages 77-90

  Koehler, R ^a,b   Bruchhaus, R ^c   Pitzer, D ^c   Primig, R ^c   Schreiter, M ^c   Wersing, W ^c   Winkler, B ^d   Gerlach, G ^a   Hofmann, G ^b   Heb, N ^b  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b DIAS Angewandte Sensorik GmbH   (Germany)

^c SIEMENS AG   (Germany)

^d INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Ferroelectric; Presence detection; Pyroelectric; Pyrometry; Thermal detector; Thin film

Indexed keywords

MICROMACHINED STRUCTURES; PYROELECTRIC ACTIVE CAPACITORS; PYROELECTRIC COEFFICIENTS; THERMAL DETECTORS;

CAPACITORS; COMPUTER SIMULATION; MICROMACHINING; MOLECULAR STRUCTURE; PYROELECTRICITY; THERMAL CONDUCTIVITY;

FERROELECTRIC THIN FILMS;

EID: 27644457862     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580215151     Document Type: Article

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