Design and realization of a very high-resolution FIB nanofabrication instrument

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 427, Issue 1-2, 1999, Pages 91-98

  Gierak, J ^a   Septier, A ^a   Vieu, C ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; ION SOURCES; LITHOGRAPHY; NANOTECHNOLOGY; OPTICAL RESOLVING POWER; PARTICLE OPTICS; SEMICONDUCTOR DEVICE STRUCTURES;

EXTRACTION VOLTAGE; FOCUSED ION BEAM TECHNOLOGY; LIQUID METAL ION SOURCES;

ION BEAMS;

EID: 0344183104     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(98)01541-1     Document Type: Article

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