Structural and electrical characterisation of semiconductor materials using a nuclear microprobe

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 1-13

  Jamieson, D N ^a  

^a UNIVERSITY OF MELBOURNE   (Australia)

Author keywords

Charge trapping; Crystal defects; Ion beam induced charge; Ion channeling; Nuclear microprobe; Nuclear microscopy; Semiconductor crystals; Trace elements

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL MICROSTRUCTURE; ELECTRIC CHARGE; ELECTRONIC PROPERTIES; ION BEAMS; LUMINESCENCE; MICROSCOPIC EXAMINATION; MORPHOLOGY; NANOSTRUCTURED MATERIALS; NONDESTRUCTIVE EXAMINATION; RADIOGRAPHY; TRACE ELEMENTS;

ION BEAM ANALYSIS; ION BEAM INDUCED CHARGE IMAGING; ION MICROTOMOGRAPHY; IONOLUMINESCENCE; NUCLEAR MICROPROBE ANALYSIS;

SEMICONDUCTOR MATERIALS;

EID: 0032020888     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00657-5     Document Type: Article

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