Leakage currents at crystallites in ZrAlxOy thin films measured by conductive atomic-force microscopy

Applied Physics Letters

Volumn 90, Issue 23, 2007, Pages

  Bierwagen, O ^a,b,d   Geelhaar, L ^a,b   Gay, X ^a,b   Piesins M ^a,b   Riechert, H ^a,b   Jobst, B ^c   Rucki, A ^c  

^a QIMONDA DRESDEN GMBH AND CO OHG   (Germany)

^b NaMLab   (Germany)

^c SIEMENS AG   (Germany)

^d HUMBOLDT UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLITES; ELECTRIC FIELD EFFECTS; LEAKAGE CURRENTS; MORPHOLOGY; ZIRCONIUM COMPOUNDS;

AMORPHOUS MATRIX; CURRENT DISTRIBUTIONS; SPATIAL DISTRIBUTION;

AMORPHOUS FILMS;

EID: 34250754390     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2746058     Document Type: Article

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