Conduction mechanisms in amorphous and crystalline Ta2O5 thin films

Journal of Applied Physics

Volumn 83, Issue 9, 1998, Pages 4797-4801

  Ezhilvalavan, S ^a   Tseng, Tseung Yuen ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CRYSTALLINE MATERIALS; CURRENT DENSITY; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC FIELDS; GRAIN BOUNDARIES; LEAKAGE CURRENTS; MAGNETRON SPUTTERING; MIM DEVICES; PERMITTIVITY; TANTALUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

OHMIC CONDUCTION; SCHOTTKY MECHANISM; TANTALUM PENTOXIDE;

THIN FILMS;

EID: 0032073164     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367272     Document Type: Article

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