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Volumn 444, Issue , 1997, Pages 227-232
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Titanium-nickel shape memory thin film actuators for micromachined valves
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC FIELD EFFECTS;
ELECTRIC HEATING;
MECHANICAL PROPERTIES;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
SHAPE MEMORY EFFECT;
TEMPERATURE;
THIN FILM DEVICES;
TITANIUM ALLOYS;
JOULE HEATING;
MICROMACHINED VALVES;
PRESSURE TEMPERATURE CONTROLLED FIXTURE;
TITANIUM NICKEL ALLOYS;
TRANSFORMATION TEMPERATURE;
ACTUATORS;
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EID: 0030643164
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (25)
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References (15)
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