Titanium-nickel shape memory thin film actuators for micromachined valves

Materials Research Society Symposium - Proceedings

Volumn 444, Issue , 1997, Pages 227-232

  Kahn, H ^a   Benard, W L ^a   Huff, M A ^a   Heuer, A H ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRIC HEATING; MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SHAPE MEMORY EFFECT; TEMPERATURE; THIN FILM DEVICES; TITANIUM ALLOYS;

JOULE HEATING; MICROMACHINED VALVES; PRESSURE TEMPERATURE CONTROLLED FIXTURE; TITANIUM NICKEL ALLOYS; TRANSFORMATION TEMPERATURE;

ACTUATORS;

EID: 0030643164     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)