Microfabricated PDMS check valves

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 5, Issue , 2003, Pages 369-372

  Yang, Bozhi ^a   Lopez, George C ^b   Lin, Qiao ^a   Rosenbloom, Alan J ^c,d  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

^d UNIVERSITY OF PITTSBURGH SCHOOL OF MEDICINE   (United States)

Author keywords

Microfluidic diode; Microfluidics; Microvalve; PDMS; Replica molding; Soft lithography

Indexed keywords

COMPUTER AIDED DESIGN; HYDRODYNAMICS; MASKS; MICROMACHINING; PHOTORESISTS; POLYMERS; POWER CONTROL; SILICON; SOLIDIFICATION; SPIN COATING;

MICROFLUIDIC DIODE; MICROFLUIDICS; MICROVALVE; POLYDIMETHYLSILOXANE (PDMS); REPLICA MOLDING; SOFT LITHOGRAPHY;

VALVES (MECHANICAL);

EID: 1942520222     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2003-41213     Document Type: Conference Paper

References (8)

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