Miniature thin film NiTi hydraulic actuator with MEMS microvalves

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5762, Issue , 2005, Pages 187-195

  McKnight, Geoff ^a   Momoda, Leslie ^a   Croft, Don ^b   Lee, Dong Gun ^c   Shin, Daniel ^c   Carman, Greg ^c  

^a Hughes Aircraft Co   (United States)

^b RAYTHEON COMPANY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Actuation; Microvalve; Shape memory alloy; Thin film

Indexed keywords

ACTUATION; MICROVALVES;

BIOMEDICAL ENGINEERING; HYDRAULIC MACHINERY; MICROELECTROMECHANICAL DEVICES; POWER ELECTRONICS; SHAPE MEMORY EFFECT; THIN FILMS;

ACTUATORS;

EID: 25144471771     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.607307     Document Type: Conference Paper

References (5)

1. Lavine, A. S., and Carman, G.P., "Thermomechanical Modeling of Thin Film Shape Memory Alloy Devices", Thermal Science and Engineering, 8, 2000, pp. 13-23.
2. Momoda, L., Croft, D., Carman, D., Shin, D., "Compact Hybrid Actuator Device (CHAD) for Ultracompact Navigation, Guidance, and Control, " Proceedings of the SPIE, Vol. 5054, 2003, pp. 85-94.
3. Ho, K., and Carman, G.P., "Sputter Deposition of NiTi Thin Film SMA Using a Heated Target," Thin Solid Films, Vol. 370, (2000), pp. 18-29.
4. nd Annual Microelectronic Engineering Conference, 2004, pp.52-56.
5. Li, B., Chen Q., Lee D.G., Woolman J., and Carman G.P., "Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps," Sensors and Actuators A: Physical, Volume 117, Issue 2, 2005, pp. 325-330.