Ionscan: Scanning and control software for proton beam writing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 231, Issue 1-4, 2005, Pages 400-406

  Bettiol, A A ^a   Udalagama, C N B ^a   Kan, J A Van ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Beam scanning; Proton beam writing; Software

Indexed keywords

COMPUTER PROGRAMMING LANGUAGES; COMPUTER SOFTWARE; MAGNETIC PROPERTIES; MICROSTRUCTURE;

BEAM SCANNING; MICROFLUIDIC CHANNELS; PROTON BEAM WRITING;

PROTON BEAMS;

EID: 33644544729     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.01.090     Document Type: Conference Paper

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