A differential viscosity detector for use in miniaturized chemical separation systems

Journal of Microelectromechanical Systems

Volumn 14, Issue 1, 2005, Pages 70-80

  Blom, Marko T ^a,b   Chmela, Emil ^c   van der Heyden, Frank H J ^d   Oosterbroek, R Edwin ^a   Tijssen, Robert ^c   Elwenspoek, Miko ^a   van den Berg, Albert ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b Micronit Microfluidics   (Netherlands)

^c UNIVERSITY OF AMSTERDAM   (Netherlands)

^d DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Microfluidics; Viscometer; Viscosity detection

Indexed keywords

DETECTORS; ETHANOL; FLUIDIC DEVICES; LIQUID CHROMATOGRAPHY; METHANOL; MICROMACHINING; POLYMERS; SENSORS; SEPARATION; VISCOMETERS;

DIFFERENTIAL VISCOSITY DETECTOR; FLUIDIC WHEATSTONE BRIDGE; MICROFLUIDICS; VISCOSITY DETECTION;

MICROELECTROMECHANICAL DEVICES;

EID: 14144253731     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.840452     Document Type: Article

References (45)

1. W. J. Lough and I. W. Wainer, High Performance Liquid Chromatography: Fundamentals Principles and Practice. London, U.K.: Blackie Academic and Professional, 1996.
2. H. Pasch and B. Trathnigg, HPLC of Polymers. Berlin, Germany: Springer, 1998, pp. 31-39.
3. J. Brandrup and E. Immergut, Polymer Handbook. London, U.K.: Wiley, 1974.
4. M. T. Blom, E. Chmela, J. G. E. Gardeniers, R. Tijssen, M. Elwenspoek, and A. van den Berg, "Design and fabrication of a hydrodynamic chromatography chip," Sens. Actuators B, Chem., vol. 82, pp. 111-116, 2002.
5. E. Chmela, M. T. Blom, J. G. E. Gardeniers, A. van den Berg, and R. Tijssen, "A chip system for size separation of macromolecules and particles by hydrodynamic chromatography," Anal. Chem., vol. 74, no. 14, pp. 3470-3475, 2002.
6. M. T. Blom, E. Chmela, R. E. Oosterbroek, R. Tijssen, and A. van den Berg, "On-chip hydrodynamic chromatography separation and detection of nanoparticles and biomolecules," Anal. Chem., vol. 75, no. 24, pp. 6761-6768.
7. R. Tijssen, J. P. A. Bleumer, and M. E. van Kreveld, "Separation by flow (hydrodynamic chromatography) of macromolecules performed in open microcapillary tubes" J. Chromatogr., vol. 260, pp. 297-304, 1983.
8. R. Tijssen, J. Bos, and M. E. van Kreveld, "Hydrodynamic chromatography of macromolecules in open microcapillary tubes," Anal. Chem., vol. 58, pp. 3036-3044, 1986.
9. G. Stegeman, A. C. van Asten, J. C. Kraak, H. Poppe, and R. Tijssen, "Comparison of resolving power and separation time in thermal field-flow fractionation, hydrodynamic chromatography, and size-exclusion chromatography," Anal. Chem., vol. 66, pp. 1147-1160, 1994.
10. E. Chmela, M. T. Blom, J. G. E. Gardeniers, A. van den Berg, and R. Tijssen, "A pressure driven injection system for an ultra-flat chromatographic microchannel," Lab-On-A-Chip, vol. 2, pp. 235-241, 2002.
11. H. A. Barnes, J. F. Hutton, and K. Walters, An Introduction to Rheology. Amsterdam: Elsevier, 1989, pp. 16-23.
12. T. A. Chamberlin and H. E. Tuinstra, "Construction and testing of a specific viscosity detector for size exclusion chromatography," J. Appl. Polymer Sci., vol. 35, pp. 1667-1682, 1988.
13. R. E. Oosterbroek, T. S. J. Lammerink, J. W. Berenschot, A. van den Berg, and M. C. Elwenspoek, "Designing, realization and characterization of a novel capacitive pressure/flow sensor," in Proc. Transducers, Chicago, IL, 1997, pp. 151-154.
14. D. Roche, C. Richard, L. Eyraud, and C. Audoly, "Piezoelectric bimorph bending sensor for shear-stress measurement in fluid flow," Sens. Actuators A, Phys., vol. 55, pp. 157-162, 1996.
15. C. Liu, Y. C. Tai, J. B. Huang, and C. M. Ho, "Surface micromachined thermal shear stress sensor," in Proc. MEMS, Chicago, IL, 1994, pp. 9-12.
16. F. Jiang, Y. C. Tai, J. B. Huang, and C. M. Ho, "Polysilicon structures for shear stress sensors," in IEEE TENCON, Hong Kong, 1995, pp. 12-15.
17. F. Jiang, Y. C. Tai, B. Gupta, R. Goodman, S. Tung, J. B. Huang, and C. M. Ho, "A surface-micromachined shear stress imager," in Proc. MEMS San Diego, CA, 1996, pp. 110-115.
18. J. -B. Huang, S. Tung, C. M. Ho, C. Liu, and Y. C. Tai, "Improved micro thermal shear-stress sensor," IEEE Trans. Instrum. Meas., vol. 45, no. 2, pp. 570-574, 1996.
19. F. Jiang, Y. C. Tai, K. Walsh, T. Tsao, G. B. Lee, and C. M. Ho, "A flexible MEMS technology and its first application to shear stress sensor skin," in Proc. MEMS, Nagoya, Japan, 1997, pp. 465-470.
20. M. A. Schmidt, R. T. Howe, S. D. Senturia, and J. H. Haritonidis, "Design and calibration of a microfabricated floating-element shear-stress sensor," IEEE Trans. Electron Devices, vol. 35, pp. 750-757, 1988.
21. S. T. Cho, K. Najafi, C. e. Lowman, and K. D. Wise, "An ultrasensitive silicon pressure-based microflow sensor," IEEE Trans. Electron Devices, vol. 49, pp. 825-835, 1992.
22. T. Sato, H. Okajima, Y. Kashiwase, R. Motegi, and H. Nakajima, "Shear horizontal acoustic plate mode viscosity sensor," Jpn. J. Appl. Phys., vol. 32, pp. 2392-2395, 1993.
23. J. W. Grate, S. J. Martin, and R. M. White, "Acoustic wave microsensors I" Anal. Chem., vol. 65, no. 21, pp. 940A-948A, 1993.
24. J. W. Grate, S. J. Martin, and R. M. White, "Acoustic wave microsensors II," Anal. Chem., vol. 65, no. 22, pp. 987A-996A, 1993.
25. B. A. Martin, S. W. Wenzel, and R. M. White, "Viscosity and density sensing with ultrasonic plate waves," Sens. Actuators A, Phys., vol. 21-23, pp. 704-708, 1990.
26. C. Zhang, J. J. Caron, and J. F. Vetelino, "The Bleustein-Gulyaev wave for liquid sensing applications," Sens. Actuators B, Chem., vol. 76, pp. 64-68, 2001.
27. F. Herrmann, D. Hahn, and S. Büttgenbach, "Separate determination of liquid density and viscosity with sagitally corrugated love-mode sensors," Sens. Actuators A, Phys., vol. 78, pp. 99-107, 1999.
28. P. Galambos and F. Forster, "An optical micro-fluidic viscometer," in Proc. ASME Int. Mech. Eng. Conference and Exposition, vol. 66, Anaheim, USA, 1998, pp. 187-191.
29. F. K. Forster, P. C. Galambos, B. H. Weigl, and M. R. Holl, "Method for Determining Concentration of a Laminar Sample Stream," U.S. Patent 6 134 950, 2000.
30. M. A. Haney, "The differential viscometer I. A new approach to the measurement of specific viscosities of polymer solutions," J. Appl. Polymer Sci., vol. 30, pp. 3023-3036, 1985.
31. M. A. Haney, "The differential viscometer II. On-line viscosity detector for size-exclusion chromatography," J. Appl. Polymer Sci. vol. 30, pp. 3037-3049, 1985.
32. M. A. Haney, "United States Patent: Capillary Bridge Viscometer," U.S. Patent 4463 598, 1984.
33. E. Chmela, M. T. Blom, F. H. van der Heyden, A. van den Berg, J. G. E. Gardeniers, and R. Tijssen, "Device for Measuring the Viscosity of a Fluid," European Patent application, no. WO2001NL00365, May 14, 2001.
34. G. K. Batchelor, An Introduction to Fluid Mechanics. Cambridge, U.K.: Cambridge University Press, 1967.
35. C. van Rijn, M. van der Wekken, W. Nijdam, and M. Elwenspoek, "Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining," J. Microelectromech. Syst., vol. 6, pp. 48-54, 1997.
36. F. H. J. van der Heyden, M. T. Blom, J. G. E. Gardeniers, E. Chmela, M. Elwenspoek, R. Tijssen, and A. van den Berg, "A low hydraulic capacitance pressure sensor for integration with a microviscosity detector," Sens. Actuators B, Chem., vol. 92, no. 1-2, pp. 102-109, 2003.
37. H. Jansen, M. de Boer, H. Wensink, B. Kloeck, and M. Elwenspoek, "The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source," Microelectron. J., vol. 32, no. 9, pp. 769-777, 2001.
38. M. de Boer, H. Gardeniers, H. Jansen, E. Smulders, M. J. Gilde, G. Roelofs, J. N. Sasserath, and M. Elwenspoek, "Guidelines for etching silicon MEMS structures using fluorine high density plasmas at cryogenic temperatures," J. Microelectromech. Syst., vol, 11, pp. 385-401, 2002.
39. H. Wensink, J. W. Berenschot, H. V. Jansen, and M. C. Elwenspoek, "High resolution powder blast micromachining," in Proc. MEMS, Miyazaki, Japan, 2000, pp. 769-774.
40. H. Wensink, H. V. Jansen, J. W. Berenschot, and M. C. Elwenspoek, "Materials and process technology - Mask materials for powder blasting," J. Micromech. Microeng., vol. 10, pp. 175-180, 2000.
41. P. J. Slikkerveer, P. C. P. Bouten, and F. C. M. de Haas, "High quality mechanical etching of brittle materials by powder blasting," Sens. Actuators A, Phys., vol. 85, pp. 296-303, 2000.
42. D. S. Viswanath and G. Natarajan, Data Book on the Viscosity of Liquids. New York: Hemisphere Pub. Corp, 1989.
43. L. Hao and D. G. Leaist, "Binary mutual diffusion coefficients for aqueous alcohols, methanol to 1-heptanol," J. Chem. Eng. Data, vol. 41, pp. 210-213, 1996.
44. D. R. Wheeler and R. Rowley, "Shear viscosity of polar liquid mixtures via nonequilibrium dynamics: Water, methanol and acetone," Mole. Phys., vol. 94, no. 3, pp. 555-564, 1998.
45. (2002) SPI Silicon Nitride Membrane Window Grids for TEM. Structure Probe Inc. [Online]. Available: http://www.2spi.com/catalog/instruments/ silicon-nitride.html