SCOPUS 정보 검색 플랫폼

Journal of Alloys and Compounds

Volumn 440, Issue 1-2, 2007, Pages 375-379

Mechanical properties of nano-structured Ti-Si-N films synthesized by cathodic arc evaporation

(5) Yang, Sheng Min a Chang, Yin Yu b Wang, Da Yung b Lin, Dong Yih c Wu, WeiTe a

a NATIONAL CHUNG HSING UNIVERSITY (Taiwan)

b MINGDAO UNIVERSITY (Taiwan)

c I SHOU UNIVERSITY (Taiwan)

Author keywords

Nanostructures; Thin films; Vapor deposition

Indexed keywords

CATHODES; EVAPORATION; NANOSTRUCTURES; SYNTHESIS (CHEMICAL); TITANIUM ALLOYS; VAPOR DEPOSITION;

CATHODIC ARC EVAPORATION; PLASMA ENHANCING FILTER DUCTS; REACTION CHAMBERS;

THIN FILMS;

EID: 34249740970 PISSN: 09258388 EISSN: None Source Type: Journal
DOI: 10.1016/j.jallcom.2006.12.124 Document Type: Article

Times cited : (34)

References (38)

1
- 0029375816
- He J.W., Bai D.D., Xu K.W., and Hu N.S. Surf. Coat. Technol. 74-75 (1995) 387-393
- (1995) Surf. Coat. Technol. , vol.74-75 , pp. 387-393
- He, J.W.¹ Bai, D.D.² Xu, K.W.³ Hu, N.S.⁴

2
- 0020779486
- Sundgren J.E., Johansson B.O., Karlasson S.E., and Hentzell H.T.G. Thin Solid Films 105 (1983) 367-384
- (1983) Thin Solid Films , vol.105 , pp. 367-384
- Sundgren, J.E.¹ Johansson, B.O.² Karlasson, S.E.³ Hentzell, H.T.G.⁴

3
- 0026120732
- Echigoya J., Liu Z.T., Imamura A., and Takatsu S. Thin Solid Films 198 (1991) 293-300
- (1991) Thin Solid Films , vol.198 , pp. 293-300
- Echigoya, J.¹ Liu, Z.T.² Imamura, A.³ Takatsu, S.⁴

4
- 0019633490
- Wittmer M., Noser J., and Melchior H. J. Appl. Phys. 52 (1981) 6659-6664
- (1981) J. Appl. Phys. , vol.52 , pp. 6659-6664
- Wittmer, M.¹ Noser, J.² Melchior, H.³

5
- 16744365752
- Wong M.S., and Lee Y.C. Surf. Coat. Technol. 120-121 (1999) 194-199
- (1999) Surf. Coat. Technol. , vol.120-121 , pp. 194-199
- Wong, M.S.¹ Lee, Y.C.²

6
- 0035481992
- Bressan J.D., Hesse R., and Silva Jr. E.M. Wear 250 (2001) 561-568
- (2001) Wear , vol.250 , pp. 561-568
- Bressan, J.D.¹ Hesse, R.² Silva Jr., E.M.³

7
- 0035907522
- Lee D.B., Kim M.H., Lee Y.C., and Kwon S.C. Surf. Coat. Technol. 141 (2001) 232-239
- (2001) Surf. Coat. Technol. , vol.141 , pp. 232-239
- Lee, D.B.¹ Kim, M.H.² Lee, Y.C.³ Kwon, S.C.⁴

8
- 0030234267
- Kim K.H., and Lee S.H. Thin Solid Films 283 (1996) 165-170
- (1996) Thin Solid Films , vol.283 , pp. 165-170
- Kim, K.H.¹ Lee, S.H.²

9
- 0033503577
- Diserens M., Patscheider J., and Lévy F. Surf. Coat. Technol. 120-121 (1999) 158-165
- (1999) Surf. Coat. Technol. , vol.120-121 , pp. 158-165
- Diserens, M.¹ Patscheider, J.² Lévy, F.³

10
- 36449001310
- Veprek S., Reiprich S., and Shizhi L. Appl. Phys. Lett. 66 (1995) 2640-2642
- (1995) Appl. Phys. Lett. , vol.66 , pp. 2640-2642
- Veprek, S.¹ Reiprich, S.² Shizhi, L.³

11
- 0031347180
- Vepřek S. Surf. Coat. Technol. 97 (1997) 15-22
- (1997) Surf. Coat. Technol. , vol.97 , pp. 15-22
- Vepřek, S.¹

12
- 0034310535
- Rebouta L., Tavares C.J., Aimo R., et al. Surf. Coat. Technol. 133-134 (2000) 234-239
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 234-239
- Rebouta, L.¹ Tavares, C.J.² Aimo, R.³

13
- 1342326361
- Choi J.B., Cho K., Lee M.H., and Kim K.H. Thin Solid Films 447-448 (2004) 365-370
- (2004) Thin Solid Films , vol.447-448 , pp. 365-370
- Choi, J.B.¹ Cho, K.² Lee, M.H.³ Kim, K.H.⁴

14
- 0040610698
- Diserens M., Patscheider J., and Lévy F. Surf. Coat. Technol. 108-109 (1998) 241-246
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 241-246
- Diserens, M.¹ Patscheider, J.² Lévy, F.³

15
- 0037011109
- Kim S.H., Kim J.K., and Kim K.H. Thin Solid Films 420-421 (2002) 360-365
- (2002) Thin Solid Films , vol.420-421 , pp. 360-365
- Kim, S.H.¹ Kim, J.K.² Kim, K.H.³

16
- 0038347319
- Watanabe H., Sato Y., Nie C., Ando A., Ohtani S., and Iwamoto N. Surf. Coat. Technol. 169-170 (2003) 452-455
- (2003) Surf. Coat. Technol. , vol.169-170 , pp. 452-455
- Watanabe, H.¹ Sato, Y.² Nie, C.³ Ando, A.⁴ Ohtani, S.⁵ Iwamoto, N.⁶

17
- 0042858383
- Nose M., Deguchi Y., Nae T., Honbo E., Nagae T., and Nogi K. Surf. Coat. Technol. 174-175 (2003) 261-265
- (2003) Surf. Coat. Technol. , vol.174-175 , pp. 261-265
- Nose, M.¹ Deguchi, Y.² Nae, T.³ Honbo, E.⁴ Nagae, T.⁵ Nogi, K.⁶

18
- 28844481918
- Flink A., Larsson T., SjOlen J., Karlsson L., and Hultman L. Surf. Coat. Technol. 200 (2005) 1535-1542
- (2005) Surf. Coat. Technol. , vol.200 , pp. 1535-1542
- Flink, A.¹ Larsson, T.² SjOlen, J.³ Karlsson, L.⁴ Hultman, L.⁵

19
- 0037109204
- Ma C.H., Huang J.H., and Chen H. Thin Solid Films 418 (2002) 73-78
- (2002) Thin Solid Films , vol.418 , pp. 73-78
- Ma, C.H.¹ Huang, J.H.² Chen, H.³

20
- 34547374271
- Williamson G.K., and Hall W.H. Acta Metall. 1 (1953) 22-31
- (1953) Acta Metall. , vol.1 , pp. 22-31
- Williamson, G.K.¹ Hall, W.H.²

21
- 1342331945
- Yau B.S., Huang J.L., Lii D.F., and Sajgalik P. Surf. Coat. Technol. 177-178 (2004) 209-214
- (2004) Surf. Coat. Technol. , vol.177-178 , pp. 209-214
- Yau, B.S.¹ Huang, J.L.² Lii, D.F.³ Sajgalik, P.⁴

22
- 0023843137
- Valvoda V., Kužel Jr. R., and Musil R.C. Thin Solid Films 156 (1988) 53-64
- (1988) Thin Solid Films , vol.156 , pp. 53-64
- Valvoda, V.¹ Kužel Jr., R.² Musil, R.C.³

23
- 0004029498
- Noyes, New Jersey
- Boxman R.L., Sanders D.M., Martin P.J., and Lafferty J.M. Handbook of Vacuum Arc Science and Technology (1995), Noyes, New Jersey
- (1995) Handbook of Vacuum Arc Science and Technology
- Boxman, R.L.¹ Sanders, D.M.² Martin, P.J.³ Lafferty, J.M.⁴

24
- 1842765584
- Bujak J., Walkowicz J., and Kusinski J. Surf. Coat. Technol. 180-181 (2004) 150-157
- (2004) Surf. Coat. Technol. , vol.180-181 , pp. 150-157
- Bujak, J.¹ Walkowicz, J.² Kusinski, J.³

25
- 28844467225
- Chang Y.Y., Wang D.Y., and Hung C.Y. Surf. Coat. Technol. 200 (2005) 1702-1708
- (2005) Surf. Coat. Technol. , vol.200 , pp. 1702-1708
- Chang, Y.Y.¹ Wang, D.Y.² Hung, C.Y.³

26
- 1342332670
- Park O.N., Park J.H., Yoon S.Y., Lee M.H., and Kim K.H. Surf. Coat. Technol. 179 (2004) 83-88
- (2004) Surf. Coat. Technol. , vol.179 , pp. 83-88
- Park, O.N.¹ Park, J.H.² Yoon, S.Y.³ Lee, M.H.⁴ Kim, K.H.⁵

27
- 28944450762
- Kang M.C., Kim J.S., and Kim K.H. Surf. Coat. Technol. 200 (2005) 1939-1944
- (2005) Surf. Coat. Technol. , vol.200 , pp. 1939-1944
- Kang, M.C.¹ Kim, J.S.² Kim, K.H.³

28
- 0347354999
- Jiang N., Shen Y.G., Mai Y.W., Chan T., and Tung S.C. Mater. Sci. Eng. B106 (2004) 163-171
- (2004) Mater. Sci. Eng. , vol.B106 , pp. 163-171
- Jiang, N.¹ Shen, Y.G.² Mai, Y.W.³ Chan, T.⁴ Tung, S.C.⁵

29
- 0024664405
- Du H., Tressler R.E., Spear K.E., and Pantano C.G. J. Electrochem. Soc. 136 (1989) 1527-1536
- (1989) J. Electrochem. Soc. , vol.136 , pp. 1527-1536
- Du, H.¹ Tressler, R.E.² Spear, K.E.³ Pantano, C.G.⁴

30
- 45949127998
- Török E., Perry A.J., Chollet L., and Sproul W.D. Thin Solid Films 153 (1987) 37-43
- (1987) Thin Solid Films , vol.153 , pp. 37-43
- Török, E.¹ Perry, A.J.² Chollet, L.³ Sproul, W.D.⁴

31
- 0029510618
- Tsui T.Y., Pharr G.M., Oliver W.C., Bhatia C.S., White R.L., Anders S., Anders A., and Brown I.G. Mater. Res. Soc. Symp. Proc. 383 (1995) 447-452
- (1995) Mater. Res. Soc. Symp. Proc. , vol.383 , pp. 447-452
- Tsui, T.Y.¹ Pharr, G.M.² Oliver, W.C.³ Bhatia, C.S.⁴ White, R.L.⁵ Anders, S.⁶ Anders, A.⁷ Brown, I.G.⁸

32
- 0037094338
- Musil J., Kunc F., Zeman H., and Poláková H. Surf. Coat. Technol. 154 (2002) 304-313
- (2002) Surf. Coat. Technol. , vol.154 , pp. 304-313
- Musil, J.¹ Kunc, F.² Zeman, H.³ Poláková, H.⁴

33
- 0034324823
- Leyland A., and Matthews A. Wear 246 (2000) 1-11
- (2000) Wear , vol.246 , pp. 1-11
- Leyland, A.¹ Matthews, A.²

34
- 0034310532
- Mayrhofer P.H., and Mitterer C. Surf. Coat. Technol. 133-134 (2000) 131-137
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 131-137
- Mayrhofer, P.H.¹ Mitterer, C.²

35
- 0029141722
- Oettel H., and Wiedeman R. Surf. Coat. Technol. 76-77 (1995) 265-273
- (1995) Surf. Coat. Technol. , vol.76-77 , pp. 265-273
- Oettel, H.¹ Wiedeman, R.²

36
- 29244447078
- Martin P.J., Bendavid A., Cairney J.M., and Hoffman M. Surf. Coat. Technol. 200 (2005) 2228-2235
- (2005) Surf. Coat. Technol. , vol.200 , pp. 2228-2235
- Martin, P.J.¹ Bendavid, A.² Cairney, J.M.³ Hoffman, M.⁴

37
- 28944448440
- Bielawski M., and Seo D. Surf. Coat. Technol. 200 (2006) 1476-1482
- (2006) Surf. Coat. Technol. , vol.200 , pp. 1476-1482
- Bielawski, M.¹ Seo, D.²

38
- 32844454699
- Bielawski M. Surf. Coat. Technol. 200 (2006) 3987-3995
- (2006) Surf. Coat. Technol. , vol.200 , pp. 3987-3995
- Bielawski, M.¹

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