Fabrication of micro nickel/diamond abrasive pellet array lapping tools using a LIGA-like technology

Journal of Micromechanics and Microengineering

Volumn 17, Issue 6, 2007, Pages 1130-1138

  Luo, Sheng Yih ^a   Yu, Tsung Han ^a   Hu, Yuh Chung ^a  

^a HUAFAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; ALUMINUM ALLOYS; COATINGS; DIAMONDS; LITHOGRAPHY; NICKEL;

ABRASIVE PELLET ARRAY; BLADE AGITATION; LIGA-LIKE TECHNOLOGY; MICRO ROOTS;

LAPPING MACHINES;

EID: 34249700319     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/6/005     Document Type: Article

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