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Volumn 40, Issue 7, 2000, Pages 1065-1072

Improvement of thickness uniformity in nickel electroforming for the LIGA process

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; ELECTROFORMING; LITHOGRAPHY; METALLOGRAPHIC MICROSTRUCTURE; NICKEL;

EID: 0033874810     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0890-6955(99)00107-8     Document Type: Article
Times cited : (81)

References (13)
  • 1
    • 0022717983 scopus 로고
    • Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
    • Becker E.W., Ehreld W., Hagmann P., Maner A., Münchmeyer D. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process). Microelectronic Engineering. 4:1986;35-36.
    • (1986) Microelectronic Engineering , vol.4 , pp. 35-36
    • Becker, E.W.1    Ehreld, W.2    Hagmann, P.3    Maner, A.4    Münchmeyer, D.5
  • 2
    • 0026153563 scopus 로고
    • Fabrication of capacitive acceleration sensors by the LIGA technique
    • Burbaum C., Mphr J., Bley P. Fabrication of capacitive acceleration sensors by the LIGA technique. Sensors and Actuators A. 25-27:1991;559-563.
    • (1991) Sensors and Actuators a , vol.2527 , pp. 559-563
    • Burbaum, C.1    Mphr, J.2    Bley, P.3
  • 6
    • 0027607944 scopus 로고
    • Metallic microstructures fabricated using photosensitive polyimide electroplating molds
    • Frazier A.B., Allen M.G. Metallic microstructures fabricated using photosensitive polyimide electroplating molds. Journal of Microelectromechanical Systems. 2(2):1993;87-94.
    • (1993) Journal of Microelectromechanical Systems , vol.2 , Issue.2 , pp. 87-94
    • Frazier, A.B.1    Allen, M.G.2
  • 9
    • 0032646818 scopus 로고    scopus 로고
    • Three X-ray mask-making methods applied for LIGA process
    • H. Yang, S.W. Kang, M.C. Chou, Three X-ray mask-making methods applied for LIGA process, Proceedings of SPIE, 1999, Vol. 3680, pp. 495-501.
    • (1999) Proceedings of SPIE , vol.3680 , pp. 495-501
    • Yang, H.1    Kang, S.W.2    Chou, M.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.