UV-LIGA interferometer biosensor based on the SU-8 optical waveguide

Sensors and Actuators, A: Physical

Volumn 120, Issue 2, 2005, Pages 383-389

  Shew, B Y ^a   Kuo, C H ^b   Huang, Y C ^b   Tsai, Y H ^a  

^a NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Biochemical sensor; Interferometer; LIGA process; Optical waveguide; SU 8 resist

Indexed keywords

ASPECT RATIO; INTERFEROMETERS; OPTICAL WAVEGUIDES; OPTIMIZATION; REFRACTIVE INDEX; SENSITIVITY ANALYSIS; SODIUM CHLORIDE; SOLUTIONS; ULTRAVIOLET RADIATION;

BIOCHEMICAL SENSOR; INDUSTRIAL DETECTION; OPTICAL WAVEGUIDE; SU-8 RESIST;

BIOSENSORS;

EID: 17644381583     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.01.004     Document Type: Article

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