Solid micromechanical valves fabricated with in situ UV-LIGA assembled nickel

Sensors and Actuators, A: Physical

Volumn 126, Issue 1, 2006, Pages 187-193

  Li, Bo ^a,b   Chen, Quanfang ^a  

^a University of Central Florida   (United States)

^b NScrypt Inc (www Nscryptbiz)   (United States)

Author keywords

In situ UV LIGA assemble; Robust microvalve; Solid nickel

Indexed keywords

MICROMECHANICAL VALVES; STRESS VALVE DESIGN; UNLOADING TEST;

NANOSTRUCTURED MATERIALS; STRESS ANALYSIS; VALVES (MECHANICAL);

NICKEL;

EID: 31144438660     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.10.009     Document Type: Article

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