Electron drift velocity in silane in strong electric fields determined from rf breakdown curves

Journal of Physics D: Applied Physics

Volumn 40, Issue 11, 2007, Pages 3408-3410

  Lisovskiy, V ^a   Booth, J P ^b   Landry, K ^c   Douai, D ^d   Cassagne, V ^e   Yegorenkov, V ^a  

^a V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

^b ECOLE POLYTECHNIQUE   (France)

^c SAS   (France)

^d IRFM   (France)

^e Riber   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC DISCHARGES; ELECTRON BEAMS;

BREAKDOWN CURVES; ELECTRON DRIFT VELOCITY; LOW PRESSURE SILANE;

SILANES;

EID: 34249291954     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/11/022     Document Type: Article

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