Gaseous slip flow analysis of a micromachined flow sensor for ultra small flow applications

Journal of Micromechanics and Microengineering

Volumn 17, Issue 2, 2007, Pages 229-237

  Jang, Jaesung ^a   Wereley, Steven T ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW MEASUREMENT; FLOW RATE; MICROCHANNELS; PRESSURE SENSORS; REACTIVE ION ETCHING; VELOCITY MEASUREMENT;

DEEP REACTIVE ION ETCHING (DRIE); GAS FLOWS; GASEOUS SLIP FLOW ANALYSIS; KNUDSEN NUMBER; MICROMACHINED FLOW; TANGENTIAL MOMENTUM ACCOMMODATION COEFFICIENT (TMAC);

MICROSENSORS;

EID: 34249106775     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/2/007     Document Type: Article

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