A critical evaluation of thermal mass flow meters

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2582-2591

  Tison, S A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOWMETERS-MASS; THERMALS;

EID: 0030452447     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579985     Document Type: Review

References (7)

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5. K. E. McCulloch, C. R. Tilford, C. D. Ehrlich, and F. G. Long, J. Vac. Sci. Technol. A 5, 276 (1987).
6. JANAF Thermochemical Tubes, 2nd ed. (NSRDS-National Bureau of Standards 37, Washington, DC, 1971).
7. T. Cebeci and P. Bradshaw, Physical and Computational Aspects of Convective Heat Transfer (Springer, New York, 1984).