Novel flow sensor with high time resolution based on differential pressure principle

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 118-123

  Richter, M ^a   Wackerle, M ^a   Woias, P ^a   Hillerich, B ^a  

^a IFT INSTITUT FÜR THERAPIEFORSCHUNG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW OF FLUIDS; PIEZOELECTRICITY; PRESSURE EFFECTS;

FLOW SENSORS;

SENSORS;

EID: 0032627376     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)