Wide range flow sensor - Vacuum through viscous flow conditions

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 5, 2004, Pages 1992-1999

  Sagi, Hemi ^a   Zhao, Yabin ^b   Wereley, S T ^b  

^a ATC Inc   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW SENSORS; LEAK TESTING; MASS FLOW SENSORS; VISCOUS FLOW CONDITIONS;

CALIBRATION; CAPILLARITY; CONTINUUM MECHANICS; DRUG PRODUCTS; LEAK DETECTION; PRESSURE EFFECTS; VACUUM APPLICATIONS; VISCOUS FLOW;

CHEMICAL SENSORS;

EID: 8344268554     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1776181     Document Type: Article

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