A method for precision patterning of silicone elastomer and its applications

Journal of Microelectromechanical Systems

Volumn 13, Issue 4, 2004, Pages 568-575

  Ryu, Kee Suk ^a   Wang, Xuefeng ^a   Shaikh, Kashan ^a   Liu, Chang ^a  

^a United States of America   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERS; MICROFILM; MICROSCOPIC EXAMINATION; MICROSTRUCTURE; PRINTING; SEMICONDUCTING POLYMERS; SILICON COMPOUNDS; SUBSTRATES; THICKNESS CONTROL;

MICROFABRICATION; POLYDIMETHYLSILOXANE; PRECISION PATTERNING; SCANNING PROBE CONTACT PRINTING; SCANNING PROBE MICROSCOPY; SILICON ELASTOMER;

MICROELECTROMECHANICAL DEVICES;

EID: 4344680330     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.832188     Document Type: Article

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