Nickel silicide nanowires formed in pre-patterned SiO2 trenches and their electrical transport properties

Nanotechnology

Volumn 18, Issue 19, 2007, Pages

  Wang, Q ^a   Luo, Q ^a   Gu, C Z ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON TRANSPORT PROPERTIES; FOCUSED ION BEAMS; GRAIN BOUNDARIES; NICKEL COMPOUNDS; REACTIVE ION ETCHING; SILICA; THIN FILMS;

FOCUSED ION BEAM (FIB) ETCHING; MEAN FREE PATH; NICKEL SILICIDE;

NANOWIRES;

NANOWIRE; NICKEL; SILICON;

ARTICLE; ELECTRIC ACTIVITY; ELECTRIC RESISTANCE; ELECTRON TRANSPORT; MATERIAL COATING; MATERIALS TESTING; NANOTECHNOLOGY; PARTICLE SIZE; PRIORITY JOURNAL; SEMICONDUCTOR;

EID: 34249038079     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/19/195304     Document Type: Article

References (19)

1. Chen L J and Tu K N 1991 Mater. Sci. Rep. 6 53
2. Kim J and Anderson W A 2005 Thin Solid Films 483 60
3. Kim G B, Yoo D J, Baik H K, Myoung J M, Lee S M, Oh S H and Park C G 2003 J. Vac. Sci. Technol. B 21 319
4. Lavoie C, Heurle F M, Detavernier C and Cabral C Jr 2003 Microelectron. Eng. 70 144
5. Kittl J A, Lauwers A, Chamirian O, Van Dal M, Akheyar A, DePotter M, Lindsay R and Maex K 2003 Microelectron. Eng. 70 158
6. Decker C A, Solanki R, Freeouf J L, Carruthers J R and Evans D R 2004 Appl. Phys. Lett. 84 1389
7. Morimoto T et al 1995 IEEE Trans. Electron Devices 42 915
8. Ko F-H, Yeh Z-H, Chen C-C and Liu T-F 2005 J. Vac. Sci. Technol. B 23 3000
9. Kim J and Anderson W A 2006 Nano Lett. 6 1356
10. Chen S Y and Chen L J 2006 Thin Solid Films 508 222
11. Bischoff L, Schmidt B, Akhmadaliev Ch and Mucklich A 2006 Microelectron. Eng. 83 800
12. Lee K S, Mo Y H, Nahm K S, Shim H W, Suh E K, Kim J R and Kim J J 2004 Chem. Phys. Lett. 384 215
13. Yamamoto K, Kohno H, Takeda S and Ichikawa S 2006 Appl. Phys. Lett. 89 083107
14. Yue S L, Luo Q, Shi C Y, Yang H X, Wang Q, Xu P and Gu C Z 2006 Chin. Phys. Lett. 23 678
15. Wu Y, Xiang J, Yang C, Lu W and Lieber C M 2004 Nature 430 61
16. Meyer B, Gottlieb U, Laborde O, Yang H, Lasjaunias J C, Sulpice A and Madar R 1997 J. Alloys Compounds 262 235
17. Dong L, Bush J, Chirayos V, Solanki R, Jiao J, Ono Y, Conley J F Jr and Ulrich B D 2005 Nano Lett. 5 2112
18. Reynolds F W and Stilwell G R 1952 Phys. Rev. 88 418
19. Arajs S, Oliver B F and Michalak J 1967 J. Appl. Phys. 38 1676