Self-assembled epitaxial NiSi2 nanowires on Si(001) by reactive deposition epitaxy

Thin Solid Films

Volumn 508, Issue 1-2, 2006, Pages 222-225

  Chen, S Y ^a   Chen, L J ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Nanostructures; Silicides

Indexed keywords

EPITAXIAL GROWTH; KINETIC ENERGY; NANOSTRUCTURED MATERIALS; NICKEL COMPOUNDS; SELF ASSEMBLY; SILICON;

ASYMMETRIC GROWTH; NANOWIRE; REACTIVE DEPOSITION EPITAXY; SILICIDES;

THIN FILMS;

EID: 33646111704     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.322     Document Type: Article

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