Self-aligned platinum-silicide nanowires for biomolecule sensing

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 3000-3005

  Ko, Fu Hsiang ^a   Yeh, Zen Hou ^a   Chen, Chun Chi ^a   Liu, Tzeng Feng ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMATERIALS; DEPOSITION; ELECTRON BEAMS; NANOSTRUCTURED MATERIALS; PLATINUM; SILICON ALLOYS;

BIOMOLECULE SENSING; ELECTRON-BEAM WRITING; NANOWIRES; PLATINUM FILM DEPOSITION;

WIRE;

EID: 29044434903     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2090967     Document Type: Article

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