AIN-based film bulk acoustic resonator devices with W/SiO2 multilayers reflector for rf bandpass filter application

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 4, 2001, Pages 1164-1168

  Kim, Sang Hee ^a   Kim, Jong Heon ^a   Park, Hee Dae ^b   Yoon, Giwan ^c  

^a Kwangwoon University   (South Korea)

^b Research   (South Korea)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; BANDPASS FILTERS; MAGNETRON SPUTTERING; MORPHOLOGY; PHOTOLITHOGRAPHY; PIEZOELECTRIC DEVICES; REFLECTION; SCANNING ELECTRON MICROSCOPY; SILICA; SPUTTER DEPOSITION; X RAY DIFFRACTION ANALYSIS;

ACOUSTIC STANDING WAVE; ELECTROMECHANCICAL COUPLING COEFFICIENT; FILM BULK ACOUSTIC RESONATOR; INSERTION LOSS; PARALLEL RESONANCE FREQUENCY; QUALITY FACTOR; RETURN LOSS; SERIES RESONANCE FREQUENCY;

ALUMINUM NITRIDE;

EID: 0035535238     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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